SemiAn Exhaust Gas Treatment Systems

Product Overview

Our partner SemiAn Technology specializes in advanced exhaust gas treatment systems, designed primarily for semiconductor industry processes. The company has developed highly efficient gas cleaners that reliably remove hazardous emissions in LCD manufacturing, as well as solutions for other industrial applications and compact models for research facilities.

The founders of SemiAn bring extensive expertise from across all areas of semiconductor production, ensuring innovation and technical excellence. A key strength of SemiAn is its flexibility: customer-specific requirements are carefully addressed and implemented.

SemiAn’s mission is to provide expert consulting for exhaust gas cleaning challenges, and systems that deliver maximum operational safety with minimal downtime.

SemiAn has its offices in the Chungnam Techno Park in Cheonan City.

Product types

Here you will find an overview of the most common models. Further details can be found on the separate product pages for wet scrubbers for neutralizing soluble gases,  combustion systems, where toxic gases are thermally decomposed (resulting particulates are captured in a subsequent scrubber), and for dry cleaners, where hazardous components are adsorbed onto the surface of special chemicals.

Model Technology Gas flow Notes
SSW 200 Wet scrubbing 200 slm for soluble gases
SBW 200 Combustion and wet scrubbing 200-400 slm base version
SBW 200 PLASMA SBW 200 with plasma burner 200 slm Decomposition of CFCs
SBW 202 Combustion and wet scrubbing 800-1200 slm 2 or 3 combustion units in parallel
SWB 200 Combustion and wet scrubbing 200-400 slm with additional upstream wet scrubber
SSD models Chemisorption 50 - 400 slm automatic bypass function
SBD 200 Combustion and adsorption 200 slm special applications
MIDAS I Gas burner / wet scrubbing 200 slm for CFCs
MIDAS II Combustion and cooling 200 slm dry exhaust gas treatment