US Patent 7619810 - MEMS array testing

http://www.freepatentsonline.com/7619810.html

This patent from IDC LLC (now part of Qualcomm) has very early priority (1994) and includes very basic claims to array-based testing of micromechanical devices. Claim 23 reads:

23. A system comprising:

an array of nodes organized into rows and columns, each node having a micro-electromechanical (MEM) device, a first switch coupling a column line to the MEM device and a second switch coupling a voltage to the MEM device; and,

a testing mechanism situated outside of the array of nodes to test each node for proper operation by selecting a row and a column of the nodes in which the node is located to turn on the first and the second switches of the node.

US Patent 7532386 - MEMS offset voltage modification

http://www.freepatentsonline.com/7532386.html

This patent from Iridigm Display Corp. (acquired by Qualcomm) includes some very basic claims to a manufacturing process of MEMS devices including an offset voltage correction step. Claim 1 reads:

1. A process development method, comprising:

identifying at least one processing parameter for manufacturing a MEMS device that results in a non-zero offset voltage for the MEMS device; and

modifying the processing parameter to shift the non-zero offset voltage closer to zero.

US Patent 7489428 - Variable threshold MEMS array actuator

http://www.freepatentsonline.com/7489428.html

For multi-gradation effects it is difficult to implement MEMS-based micromirrors formed from interferometric ribbons in an analog mode. This patent from IDC (now being developed by Qualcomm) teaches an alternative solution based on a halftone method. Claim 1 reads:

1. A MEMS device, comprising:

a plurality of elements having differing values of at least one of a time-based activation threshold for a select voltage and a voltage-based activation threshold for a select time; and

addressing lines configured to provide signals of at least one of selectable voltage and selectable time to the elements such that different numbers of elements activate in a selectable manner, according to the voltage and time of the signals.

US Patent 7483197 - Multicolor micromirror display

http://www.freepatentsonline.com/7483197.html

This patent originally from IDC (acquired by Qualcomm for mobile device displays) has very early priority going back to 1994 and includes basic claims to four color interferometric micromirror displays. Claim 1 reads:

1. A device for displaying an image, comprising:

a plurality of interferometric modulators, said plurality of interferometric modulators comprising:

at least one interferometric modulator configured to output red light;

at least one interferometric modulator configured to output green light;

at least one interferometric modulator configured to output blue light; and

at least one interferometric modulator configured to output white light.

US Patent 7463421 - Image capturing using MEMS

http://www.freepatentsonline.com/7463421.html

Iridigm Display Corporation (IDC), a pioneer in MEMS based interferometric displays, was acquired by Qualcomm a few years ago. This patent from IDC has some very basic claims to image capturing devices (e.g. cameras, printers) using MEMS filters with early priority going back to May 5, 1994. Claim 1 reads:

1. A system for selecting spectral frequencies of light, comprising:

a tunable filter comprising a MEMS device comprising a movable layer, said MEMS device configured to select a range of spectral frequencies of light; and

a photosensitive device spaced apart from the movable layer, wherein said MEMS device is disposed to direct at least a portion of said selected spectral frequencies onto said photosensitive device.

US Patent 7345805 - Integration of MEMS micromirrors with MEMS switches

http://www.freepatentsonline.com/7345805.html

This patent from Iridigm Display (which was acquired by Qualcomm in 2004) is basic to displays using micromirrors which can switch between reflective and opaque states depending on interference patterns created by the micromirrors. This patent focused on an all-MEMS display design which uses micromechanical structures as the addressing elements for driving the rows and column pixels as well as for the micromirrors. This may simplify fabrication in comparison to the formation of both drive transistors and MEMS in the display which requires diverse fabrication steps which may be non-compatible. Claim 1 reads:

1. A display device comprising:

a MEMS display portion comprising rows and columns of MEMS elements; and

a plurality of MEMS switches formed as one or more additional rows or columns of additional MEMS elements adjacent to the MEMS elements of said display portion, wherein the pitch of the additional MEMS elements is matched with the pitch of the MEMS elements of the display, and wherein the additional MEMS elements are configured to switch signals to the display portion.